FE‐based modeling of a mesoscale piezoelectric motor

The manufacturing of systems at the mesoscale on order millimeters to centimeters is costly and challenging. To simplify development process, finite element method (FEM) can be used compare evaluate different design variations an early stage. This also allows for gaining a more precise understanding system's behavior. In robotic applications it torque that greatest interest as sufficiently high mitigates need gearbox, which very difficult manufacture integrate small scales. Given this background, present work aims develop model numerical representation class rotational piezoelectric motors based multiple unimorph arms. influence parameters resulting analyzed utilizing model. motor consists planar rotor flat spring, stator with three arms, well shaft. With total integrated thickness 0.8 mm, weight approximately 200 milligrams. rotation mainly caused by tip contact between arms itself. Experiments prototypes have shown bidirectional possible design, then investigated in detail using There are several challenges here non-linearity due individual components high-frequency excitation kHz range. modeling requires validation experiments determine properties coupled system structural components. includes both measurement natural frequencies unimorphs laser scanning vibrometer displacement sensors. provides opportunity vibration modes, important non-local output quantity, achieve good agreement experimental results. next stage, serve basis multi-objective optimization maximum smallest volume. Further miniaturization possibilities will future studies.